A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
Abstract Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting th...
| Main Authors: | , , , , , , |
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| 格式: | Article |
| 語言: | English |
| 出版: |
SpringerOpen
2021-01-01
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| 叢編: | Nanoscale Research Letters |
| 主題: | |
| 在線閱讀: | https://doi.org/10.1186/s11671-021-03481-7 |