Effects of Oxygen Partial Pressure and Substrate Temperature on the Structure and Morphology of Sc and Y Co-Doped ZrO<sub>2</sub> Solid Electrolyte Thin Films Prepared via Pulsed Laser Deposition

Effects of Oxygen Partial Pressure and Substrate Temperature on the Structure and Morphology of Sc and Y Co-Doped ZrO<sub>2</sub> Solid Electrolyte Thin Films Prepared via Pulsed Laser Deposition

Scandium (Sc) and yttrium (Y) co-doped ZrO<sub>2</sub> (ScYSZ) thin films were prepared on a SiO<sub>2</sub>-Si substrate via pulsed laser deposition (PLD) method. In order to obtain good quality thin films with the desired microstructure, various oxygen partial pressures (&l...

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Bibliographic Details
Main Authors: Jennet R. Rabo, Makoto Takayanagi, Takashi Tsuchiya, Hideki Nakajima, Kazuya Terabe, Rinlee Butch M. Cervera
Format: Article
Language:English
Published: MDPI AG 2022-01-01
Series:Materials
Subjects:
co-doped zirconia
zirconia-doped thin films
pulsed laser deposition
solid electrolyte
XPS
Online Access:https://www.mdpi.com/1996-1944/15/2/410

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https://www.mdpi.com/1996-1944/15/2/410

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