IBIL Measurement and Optical Simulation of the D<sub>I</sub> Center in 4H-SiC
In this paper, D<sub>I</sub> defects are studied via experiments and calculations. The 2 MeV H<sup>+</sup> is used to carry on an ion-beam-induced luminescence (IBIL) experiment to measure the in-situ luminescence of untreated and annealed 4H-SiC at 100 K. The results show th...
Main Authors: | , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-04-01
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Series: | Materials |
Subjects: | |
Online Access: | https://www.mdpi.com/1996-1944/16/7/2935 |