Manufacture of a Polyaniline Nanofiber Ammonia Sensor Integrated with a Readout Circuit Using the CMOS-MEMS Technique

Manufacture of a Polyaniline Nanofiber Ammonia Sensor Integrated with a Readout Circuit Using the CMOS-MEMS Technique

This study presents the fabrication of a polyaniline nanofiber ammonia sensor integrated with a readout circuit on a chip using the commercial 0.35 mm complementary metal oxide semiconductor (CMOS) process and a post-process. The micro ammonia sensor consists of a sensing resistor and an ammonia sen...

Full description

Bibliographic Details
Main Authors: Chyan-Chyi Wu, Chih-Hua Chan, Mao-Chen Liu, Ching-Liang Dai
Format: Article
Language:English
Published: MDPI AG 2009-02-01
Series:Sensors
Subjects:
Ammonia sensor
CMOS
Polyaniline
readout circuit
Online Access:http://www.mdpi.com/1424-8220/9/2/869/

Internet

http://www.mdpi.com/1424-8220/9/2/869/

Similar Items