Internal Stress Prediction and Measurement of Mid-Infrared Multilayer Thin Films

We present an experimental method for evaluating interfacial force per width and predicting internal stress in mid-infrared band-pass filters (MIR-BPF). The interfacial force per width between the two kinds of thin-film materials was obtained by experimental measurement values, and the residual stre...

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Bibliographic Details
Main Authors: Chuen-Lin Tien, Kuan-Po Chen, Hong-Yi Lin
Format: Article
Language:English
Published: MDPI AG 2021-02-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/14/5/1101