Maximum Power of Thin-Film Capacitive Electrostatic Micromotors Based on Nanogaps
This paper is devoted to the determination of the value of the maximum specific power of capacitive electrostatic micromotors based on nanometer working gaps. The motors under consideration were developed earlier. They have the following structure: a metal—thin crystalline ferroelectric layer with a...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-12-01
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| Series: | Micro |
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| Online Access: | https://www.mdpi.com/2673-8023/3/1/1 |