A New Stripline-Based Atmospheric Pressure Microwave Plasma Sheet Source Designed for Surface Modification of Materials
A new type of microwave plasma source is presented in which plasma at atmospheric pressure is generated inside a quartz rectangular flat box placed in a stripline supplied by a 2.45 GHz coaxial line. The plasma has a sheet shape and is designed for surface modification. Electric field and power flux...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-11-01
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| Series: | Materials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1996-1944/14/23/7212 |