A New Stripline-Based Atmospheric Pressure Microwave Plasma Sheet Source Designed for Surface Modification of Materials

A new type of microwave plasma source is presented in which plasma at atmospheric pressure is generated inside a quartz rectangular flat box placed in a stripline supplied by a 2.45 GHz coaxial line. The plasma has a sheet shape and is designed for surface modification. Electric field and power flux...

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Main Authors: Helena Nowakowska, Dariusz Czylkowski, Bartosz Hrycak, Mariusz Jasiński
Format: Article
Language:English
Published: MDPI AG 2021-11-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/14/23/7212
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author Helena Nowakowska
Dariusz Czylkowski
Bartosz Hrycak
Mariusz Jasiński
author_facet Helena Nowakowska
Dariusz Czylkowski
Bartosz Hrycak
Mariusz Jasiński
author_sort Helena Nowakowska
collection DOAJ
description A new type of microwave plasma source is presented in which plasma at atmospheric pressure is generated inside a quartz rectangular flat box placed in a stripline supplied by a 2.45 GHz coaxial line. The plasma has a sheet shape and is designed for surface modification. Electric field and power flux distributions, tuning characteristics, and power characteristics (ratios of radiated, absorbed, and entering power) are numerically studied for three configurations: open, semi-closed, and closed. The calculations show that near-zero radiation reduction is possible only for the closed configuration, while the ratio of radiated power to entering power is always greater than 30% for the other configurations. The moving plunger is not sufficient for the ratio of reflected to incident power to fall below 20% for both the closed and open configurations. This is possible for the semi-closed configuration, but then the radiated power is the highest. The experiment shows that for the same entering power, the plasma volume is largest for the closed configuration and smallest for the open configuration, which we attribute to the difference in radiated power. The plasma generated using the closed stripline configuration has a larger volume than plasma generated using the rectangular waveguide.
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spelling doaj.art-df13a408952e4f66a26b9f4afe70d0d12023-11-23T02:40:02ZengMDPI AGMaterials1996-19442021-11-011423721210.3390/ma14237212A New Stripline-Based Atmospheric Pressure Microwave Plasma Sheet Source Designed for Surface Modification of MaterialsHelena Nowakowska0Dariusz Czylkowski1Bartosz Hrycak2Mariusz Jasiński3Institute of Fluid Flow Machinery, Polish Academy of Sciences, Fiszera 14, 80-231 Gdańsk, PolandInstitute of Fluid Flow Machinery, Polish Academy of Sciences, Fiszera 14, 80-231 Gdańsk, PolandInstitute of Fluid Flow Machinery, Polish Academy of Sciences, Fiszera 14, 80-231 Gdańsk, PolandInstitute of Fluid Flow Machinery, Polish Academy of Sciences, Fiszera 14, 80-231 Gdańsk, PolandA new type of microwave plasma source is presented in which plasma at atmospheric pressure is generated inside a quartz rectangular flat box placed in a stripline supplied by a 2.45 GHz coaxial line. The plasma has a sheet shape and is designed for surface modification. Electric field and power flux distributions, tuning characteristics, and power characteristics (ratios of radiated, absorbed, and entering power) are numerically studied for three configurations: open, semi-closed, and closed. The calculations show that near-zero radiation reduction is possible only for the closed configuration, while the ratio of radiated power to entering power is always greater than 30% for the other configurations. The moving plunger is not sufficient for the ratio of reflected to incident power to fall below 20% for both the closed and open configurations. This is possible for the semi-closed configuration, but then the radiated power is the highest. The experiment shows that for the same entering power, the plasma volume is largest for the closed configuration and smallest for the open configuration, which we attribute to the difference in radiated power. The plasma generated using the closed stripline configuration has a larger volume than plasma generated using the rectangular waveguide.https://www.mdpi.com/1996-1944/14/23/7212microwave plasma sourceplasma sheetatmospheric pressure plasmasurface modificationtuning characteristics
spellingShingle Helena Nowakowska
Dariusz Czylkowski
Bartosz Hrycak
Mariusz Jasiński
A New Stripline-Based Atmospheric Pressure Microwave Plasma Sheet Source Designed for Surface Modification of Materials
Materials
microwave plasma source
plasma sheet
atmospheric pressure plasma
surface modification
tuning characteristics
title A New Stripline-Based Atmospheric Pressure Microwave Plasma Sheet Source Designed for Surface Modification of Materials
title_full A New Stripline-Based Atmospheric Pressure Microwave Plasma Sheet Source Designed for Surface Modification of Materials
title_fullStr A New Stripline-Based Atmospheric Pressure Microwave Plasma Sheet Source Designed for Surface Modification of Materials
title_full_unstemmed A New Stripline-Based Atmospheric Pressure Microwave Plasma Sheet Source Designed for Surface Modification of Materials
title_short A New Stripline-Based Atmospheric Pressure Microwave Plasma Sheet Source Designed for Surface Modification of Materials
title_sort new stripline based atmospheric pressure microwave plasma sheet source designed for surface modification of materials
topic microwave plasma source
plasma sheet
atmospheric pressure plasma
surface modification
tuning characteristics
url https://www.mdpi.com/1996-1944/14/23/7212
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