Calculation strength of torsion bar suspension of micromirrors (MEOMS)

Calculation strength of torsion bar suspension of micromirrors (MEOMS)

The paper considers the strength calculation of the torsion bar suspension of a micromirror with a reflective layer of high optical quality of the surface for deflecting the reflected laser beam. By changing the angle of inclination of the micromirror, the laser beam enters the various input ch...

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Bibliographic Details
Main Authors: D. I. Chernyavsky, D. D. Chernyavsky
Format: Article
Language:English
Published: Omsk State Technical University, Federal State Budgetary Educational Institution of Higher Education 2021-06-01
Series:Омский научный вестник
Subjects:
microtechnology
microelectromechanical systems (mems)
microoptoelectromechanical devices (moems)
similarity theory
torsion strength calculation
electrostatic micromirror drive
kinematics
mechanical strength
Online Access:https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2021/%E2%84%96%203%20(177)%20(%D0%9E%D0%9D%D0%92)/5-12%20%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%98.,%20%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%94..pdf

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https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2021/%E2%84%96%203%20(177)%20(%D0%9E%D0%9D%D0%92)/5-12%20%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%98.,%20%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%94..pdf

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