The Piezoresistive Performance of CuMnNi Alloy Thin-Film Pressure Sensors Prepared by Magnetron Sputtering

The Piezoresistive Performance of CuMnNi Alloy Thin-Film Pressure Sensors Prepared by Magnetron Sputtering

Effects of varying Mn and Ni concentrations on the structure and piezoresistive properties of CuMnNi films deposited by magnetron sputtering with a segmented target were investigated. An increase in the Ni content refines the CuNi film grains, inducing an increase in defects such as internal micropo...

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Bibliographic Details
Main Authors: Zhengtao Wu, Xiaotao He, Yu Cao, Qimin Wang, Yisong Lin, Liangliang Lin, Chao Liu
Format: Article
Language:English
Published: MDPI AG 2024-04-01
Series:Magnetochemistry
Subjects:
CuMnNi films
pressure sensor
piezoresistivity
magnetron sputtering
Online Access:https://www.mdpi.com/2312-7481/10/5/30

Internet

https://www.mdpi.com/2312-7481/10/5/30

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