Optofluidic Particle Manipulation Platform with Nanomembrane

Optofluidic Particle Manipulation Platform with Nanomembrane

We demonstrate a method for fabricating and utilizing an optofluidic particle manipulator on a silicon chip that features a 300 nm thick silicon dioxide membrane as part of a microfluidic channel. The fabrication method is based on etching silicon channels and converting the walls to silicon dioxide...

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Bibliographic Details
Main Authors: Zachary J. Walker, Tanner Wells, Ethan Belliston, Sage Romney, Seth B. Walker, Mohammad Julker Neyen Sampad, S M Saiduzzaman, Ravipa Losakul, Holger Schmidt, Aaron R. Hawkins
Format: Article
Language:English
Published: MDPI AG 2022-04-01
Series:Micromachines
Subjects:
optofluidic
microfluidic
nanomembrane
NEMS
lab-on-a-chip
biosensor
Online Access:https://www.mdpi.com/2072-666X/13/5/721

Internet

https://www.mdpi.com/2072-666X/13/5/721

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