Development of a solution spraying system for the synthesis of thin-film structures by the spray-pyrolysis method
Background. At the present stage of science and technology, one of the leading directions is the development of technological processes for the manufacture of nano- and microelectronic devices. Thin-film structures, on which most modern electronic components are based, are a promising area for th...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Penza State University Publishing House
2022-03-01
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| Series: | Известия высших учебных заведений. Поволжский регион:Технические науки |
| Subjects: |