Development of a novel nanoindentation technique by utilizing a dual-probe AFM system
A novel instrumentation approach to nanoindentation is described that exhibits improved resolution and depth sensing. The approach is based on a multi-probe scanning probe microscopy (SPM) tool that utilizes tuning-fork based probes for both indentation and depth sensing. Unlike nanoindentation expe...
Main Authors: | , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Beilstein-Institut
2015-10-01
|
Series: | Beilstein Journal of Nanotechnology |
Subjects: | |
Online Access: | https://doi.org/10.3762/bjnano.6.205 |