Micromachined Thermal Time-of-Flight Flow Sensors and Their Applications
Micromachined thermal flow sensors on the market are primarily manufactured with the calorimetric sensing principle. The success has been in limited industries such as automotive, medical, and gas process control. Applications in some emerging and abrupt applications are hindered due to technical ch...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-10-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/10/1729 |