A micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes
Abstract This paper presents a micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes. Theoretical analyses and numerical simulations were conducted to model the angular accelerometer with key geometrical parameters (e.g., electrode spacing, via spacing...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2022-09-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-022-00418-7 |