Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements
Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading he...
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| Format: | Article |
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MDPI AG
2022-11-01
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| Series: | Photonics |
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| Online Access: | https://www.mdpi.com/2304-6732/9/11/830 |
| _version_ | 1827645746236620800 |
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| author | Di Chang Ziqi Yin Yunke Sun Pengcheng Hu Jiubin Tan Zhigang Fan |
| author_facet | Di Chang Ziqi Yin Yunke Sun Pengcheng Hu Jiubin Tan Zhigang Fan |
| author_sort | Di Chang |
| collection | DOAJ |
| description | Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading heads are more crucial than ever. In this work, a spatially separated heterodyne grating interferometer that measures in- and out-of-plane displacements is proposed. A prototype with 3 mm diameter beams with a size of 69 mm × 51 mm × 41 mm was built and tested. The experiment results show that the 30 s stability is 2.5 nm; the periodic nonlinear errors of the two measuring directions are less than the resolutions (0.25 nm for in-plane motions and 0.15 nm for out-of-plane motions). Double-diffracted configuration ensures that the misalignment tolerances are three axes larger than ±2 mrad. |
| first_indexed | 2024-03-09T18:44:30Z |
| format | Article |
| id | doaj.art-dfd292cbeec04f6181cfb27ea8bdca21 |
| institution | Directory Open Access Journal |
| issn | 2304-6732 |
| language | English |
| last_indexed | 2024-03-09T18:44:30Z |
| publishDate | 2022-11-01 |
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| series | Photonics |
| spelling | doaj.art-dfd292cbeec04f6181cfb27ea8bdca212023-11-24T06:23:01ZengMDPI AGPhotonics2304-67322022-11-0191183010.3390/photonics9110830Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement MeasurementsDi Chang0Ziqi Yin1Yunke Sun2Pengcheng Hu3Jiubin Tan4Zhigang Fan5Postdoctoral Research Station for Optical Engineering, Research Center for Space Optical Engineering, School of Astronautics, Harbin Institute of Technology, Harbin 150001, ChinaCenter of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, ChinaCenter of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, ChinaCenter of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, ChinaCenter of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, ChinaPostdoctoral Research Station for Optical Engineering, Research Center for Space Optical Engineering, School of Astronautics, Harbin Institute of Technology, Harbin 150001, ChinaGrating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading heads are more crucial than ever. In this work, a spatially separated heterodyne grating interferometer that measures in- and out-of-plane displacements is proposed. A prototype with 3 mm diameter beams with a size of 69 mm × 51 mm × 41 mm was built and tested. The experiment results show that the 30 s stability is 2.5 nm; the periodic nonlinear errors of the two measuring directions are less than the resolutions (0.25 nm for in-plane motions and 0.15 nm for out-of-plane motions). Double-diffracted configuration ensures that the misalignment tolerances are three axes larger than ±2 mrad.https://www.mdpi.com/2304-6732/9/11/830grating interferometryheterodyne interferometrydisplacement measurement |
| spellingShingle | Di Chang Ziqi Yin Yunke Sun Pengcheng Hu Jiubin Tan Zhigang Fan Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements Photonics grating interferometry heterodyne interferometry displacement measurement |
| title | Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements |
| title_full | Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements |
| title_fullStr | Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements |
| title_full_unstemmed | Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements |
| title_short | Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements |
| title_sort | spatially separated heterodyne grating interferometer for in plane and out of plane displacement measurements |
| topic | grating interferometry heterodyne interferometry displacement measurement |
| url | https://www.mdpi.com/2304-6732/9/11/830 |
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