Development of a Piezo-Driven Liquid Jet Dispenser with Hinge-Lever Amplification Mechanism
Owing to the quick response, compact structure, high precision, huge blocking force generation, and ease of operation, piezoelectric actuators are urgently being adopted in the field of advanced dispensing for jetting performance improvement and fulfillment of precision requirements in microelectron...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-01-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/11/2/117 |