Towards the third dimension in direct electron beam writing of silver

Towards the third dimension in direct electron beam writing of silver

Carboxylates constitute an extremely promising class of precursor compounds for the electron beam induced deposition of silver. In this work both silver 2,2-dimethylbutyrate and silver pentafluoropropionate were investigated with respect to their dwell-time-dependent deposition behavior and growth c...

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Bibliographic Details
Main Authors: Katja Höflich, Jakub Mateusz Jurczyk, Katarzyna Madajska, Maximilian Götz, Luisa Berger, Carlos Guerra-Nuñez, Caspar Haverkamp, Iwona Szymanska, Ivo Utke
Format: Article
Language:English
Published: Beilstein-Institut 2018-03-01
Series:Beilstein Journal of Nanotechnology
Subjects:
carboxylate
electron beam induced deposition
silver
three-dimensional nanostructures
vertical growth rate
Online Access:https://doi.org/10.3762/bjnano.9.78

Internet

https://doi.org/10.3762/bjnano.9.78

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