Towards the third dimension in direct electron beam writing of silver
Carboxylates constitute an extremely promising class of precursor compounds for the electron beam induced deposition of silver. In this work both silver 2,2-dimethylbutyrate and silver pentafluoropropionate were investigated with respect to their dwell-time-dependent deposition behavior and growth c...
Main Authors: | Katja Höflich, Jakub Mateusz Jurczyk, Katarzyna Madajska, Maximilian Götz, Luisa Berger, Carlos Guerra-Nuñez, Caspar Haverkamp, Iwona Szymanska, Ivo Utke |
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Format: | Article |
Language: | English |
Published: |
Beilstein-Institut
2018-03-01
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Series: | Beilstein Journal of Nanotechnology |
Subjects: | |
Online Access: | https://doi.org/10.3762/bjnano.9.78 |
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