A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer

A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer

An interferometric self-calibration method for the evaluation of the pitch deviation of scale grating has been extended to evaluate the pitch deviation of the long-range type linear scale by utilizing the stitching interferometry technique. Following the previous work, in which the interferometric s...

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Bibliographic Details
Main Authors: Xin Xiong, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
Format: Article
Language:English
Published: MDPI AG 2021-11-01
Series:Sensors
Subjects:
optical encoder
linear scale
pitch deviation
stitching interferometry
self-calibration
Online Access:https://www.mdpi.com/1424-8220/21/21/7412

Internet

https://www.mdpi.com/1424-8220/21/21/7412

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