A Single-Side Micromachined MPa-Scale High-Temperature Pressure Sensor

A Single-Side Micromachined MPa-Scale High-Temperature Pressure Sensor

This paper proposes a piezoresistive high-temperature absolute pressure sensor based on (100)/(111) hybrid SOI (silicon-on-insulator) silicon wafers, where the active layer is (100) silicon and the handle layer is (111) silicon. The 1.5 MPa ranged sensor chips are designed with the size as tiny as 0...

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Bibliographic Details
Main Authors: Peng Li, Wei Li, Changnan Chen, Sheng Wu, Pichao Pan, Ke Sun, Min Liu, Jiachou Wang, Xinxin Li
Format: Article
Language:English
Published: MDPI AG 2023-04-01
Series:Micromachines
Subjects:
piezoresistive pressure sensor
high temperature
ultra-small size
(100)/(111) hybrid SOI wafer
front-side bulk-micromachining process
Online Access:https://www.mdpi.com/2072-666X/14/5/981

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https://www.mdpi.com/2072-666X/14/5/981

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