Microcalorimeter fabrication and new measurement methodology for thermal sensing in microfluidics
This work describes the integration of a Resistance Thermal Detector (RTD) microcalorimeter integrated into a 324 nL microfluidic channel. The sensor is fabricated in a clean room using photolithography and evaporation techniques, and it has a platinum serpentine with 60 windings. The RTDs undergo t...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-09-01
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| Series: | Micro and Nano Engineering |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590007223000527 |