Elastic-Plastic Properties of hard Cr-Based Nitride Coatings Deposited at Temperatures Below 200°C
Sets of Cr-based hard coatings were prepared via reactive closed field unbalanced magnetron sputtering (CFUBMS). Substrate temperature was kept in range of 150 to 200°C during deposition. Nanohardness (H) and effective modulus of elasticity (E*) of the coatings were examined, using depth-sensing ind...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
University of Kragujevac
2023-06-01
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| Series: | Tribology in Industry |
| Subjects: | |
| Online Access: | http://www.tribology.rs/journals/2023/2023-2/2023-2-13.html |