GeSe ovonic threshold switch: the impact of functional layer thickness and device size
Abstract Three-dimensional phase change memory (3D PCM), possessing fast-speed, high-density and nonvolatility, has been successfully commercialized as storage class memory. A complete PCM device is composed of a memory cell and an associated ovonic threshold switch (OTS) device, which effectively r...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Portfolio
2024-03-01
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Series: | Scientific Reports |
Subjects: | |
Online Access: | https://doi.org/10.1038/s41598-024-57029-7 |