Sensing the Mechanical Properties of AlN Thin Films Using Micromechanical Membranes in Combination with Finite-element Simulations
The current interest in quantum technologies calls for the development of novel materials and hybrid structures. Understanding the mechanical properties of a material can be a challenge, especially at the nanoscale. We use the eigenfrequencies of in-house fabricated silicon nitride membranes in comb...
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| Format: | Article |
| Language: | English |
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IFSA Publishing, S.L.
2023-12-01
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| Series: | Sensors & Transducers |
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| Online Access: | https://sensorsportal.com/HTML/DIGEST/december_2023/Vol_263/P_3307.pdf |