Design and Fabrication of a Lorentz Force Driven Micro Indenter
A MEMS based micro-actuator driven by electromagnetic force is developed to generate a micro Newton range of force for measuring the mechanical property of living cells or locally stimulating cells. The indenter consists of a probe and a couple of flexible beams with embedded electrodes. The develop...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2011-06-01
|
| Series: | Journal of Biomechanical Science and Engineering |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jbse/6/3/6_3_183/_pdf/-char/en |