Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors
<p>The asymmetric resonance response in thermally actuated piezoresistive cantilever sensors causes a need for optimization, taking parasitic actuation–sensing effects into account. In this work, two compensation methods based on Wheatstone bridge (WB) input voltage (<i>V</i>&l...
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2019-01-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | https://www.j-sens-sens-syst.net/8/37/2019/jsss-8-37-2019.pdf |