Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors
<p>The asymmetric resonance response in thermally actuated piezoresistive cantilever sensors causes a need for optimization, taking parasitic actuation–sensing effects into account. In this work, two compensation methods based on Wheatstone bridge (WB) input voltage (<i>V</i>&l...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
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Copernicus Publications
2019-01-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | https://www.j-sens-sens-syst.net/8/37/2019/jsss-8-37-2019.pdf |
| _version_ | 1811310079165595648 |
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| author | A. Setiono A. Setiono A. Setiono M. Fahrbach M. Fahrbach J. Xu J. Xu M. Bertke M. Bertke W. O. Nyang'au W. O. Nyang'au W. O. Nyang'au G. Hamdana G. Hamdana H. S. Wasisto H. S. Wasisto E. Peiner E. Peiner |
| author_facet | A. Setiono A. Setiono A. Setiono M. Fahrbach M. Fahrbach J. Xu J. Xu M. Bertke M. Bertke W. O. Nyang'au W. O. Nyang'au W. O. Nyang'au G. Hamdana G. Hamdana H. S. Wasisto H. S. Wasisto E. Peiner E. Peiner |
| author_sort | A. Setiono |
| collection | DOAJ |
| description | <p>The asymmetric resonance response in
thermally actuated piezoresistive cantilever sensors causes a need for
optimization, taking parasitic actuation–sensing effects into account. In
this work, two compensation methods based on Wheatstone bridge (WB) input
voltage (<i>V</i><sub>WB_in</sub>) adjustment and reference circuit involvement
were developed and investigated to diminish those unwanted coupling
influences. In the first approach, <i>V</i><sub>WB_in</sub> was increased,
resulting in a higher current flowing through the WB piezoresistors as well
as a temperature gradient reduction between the thermal actuator (heating
resistor: HR) and the WB, which can consequently minimize the parasitic
coupling. Nevertheless, increasing <i>V</i><sub>WB_in</sub> (e.g., from 1 to
3.3 V) may also yield an unwanted increase in power consumption by
more than 10 times. Therefore, a second compensation method was considered:
i.e., a reference electronic circuit is integrated with the cantilever
sensor. Here, an electronic reference circuit was developed, which mimics the
frequency behavior of the parasitic coupling. By subtracting the output of
this circuit from the output of the cantilever, the resonance response can
thus be improved. Both simulated and measured data show optimized amplitude
and phase characteristics around resonant frequencies of 190.17 and
202.32 kHz, respectively. With this phase optimization in place, a
phase-locked-loop (PLL) based system can be used to track the resonant
frequency in real time, even under changing conditions of temperature (<i>T</i>)
and relative humidity (RH), respectively. Finally, it is expected to enhance
the sensitivity of such piezoresistive electro-thermal cantilever sensors
under loading with any target analytes (e.g., particulate matter, gas, and
humidity).</p> |
| first_indexed | 2024-04-13T09:52:26Z |
| format | Article |
| id | doaj.art-e16b5aa32c7d4b24b4c55e27d9bf55be |
| institution | Directory Open Access Journal |
| issn | 2194-8771 2194-878X |
| language | English |
| last_indexed | 2024-04-13T09:52:26Z |
| publishDate | 2019-01-01 |
| publisher | Copernicus Publications |
| record_format | Article |
| series | Journal of Sensors and Sensor Systems |
| spelling | doaj.art-e16b5aa32c7d4b24b4c55e27d9bf55be2022-12-22T02:51:33ZengCopernicus PublicationsJournal of Sensors and Sensor Systems2194-87712194-878X2019-01-018374810.5194/jsss-8-37-2019Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensorsA. Setiono0A. Setiono1A. Setiono2M. Fahrbach3M. Fahrbach4J. Xu5J. Xu6M. Bertke7M. Bertke8W. O. Nyang'au9W. O. Nyang'au10W. O. Nyang'au11G. Hamdana12G. Hamdana13H. S. Wasisto14H. S. Wasisto15E. Peiner16E. Peiner17Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, 38106 Braunschweig, GermanyLaboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, Langer Kamp 6a, 38106 Braunschweig, GermanyResearch Centre for Physics, Indonesia Institute of Sciences (LIPI), Kawasan Puspiptek Serpong, 15314 Tangerang Selatan, IndonesiaInstitute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, 38106 Braunschweig, GermanyLaboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, Langer Kamp 6a, 38106 Braunschweig, GermanyInstitute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, 38106 Braunschweig, GermanyLaboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, Langer Kamp 6a, 38106 Braunschweig, GermanyInstitute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, 38106 Braunschweig, GermanyLaboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, Langer Kamp 6a, 38106 Braunschweig, GermanyInstitute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, 38106 Braunschweig, GermanyLaboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, Langer Kamp 6a, 38106 Braunschweig, GermanyDepartment of Metrology, Kenya Bureau of Standards (KEBS), Popo Rd, 00200 Nairobi, KenyaInstitute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, 38106 Braunschweig, GermanyLaboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, Langer Kamp 6a, 38106 Braunschweig, GermanyInstitute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, 38106 Braunschweig, GermanyLaboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, Langer Kamp 6a, 38106 Braunschweig, GermanyInstitute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, 38106 Braunschweig, GermanyLaboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, Langer Kamp 6a, 38106 Braunschweig, Germany<p>The asymmetric resonance response in thermally actuated piezoresistive cantilever sensors causes a need for optimization, taking parasitic actuation–sensing effects into account. In this work, two compensation methods based on Wheatstone bridge (WB) input voltage (<i>V</i><sub>WB_in</sub>) adjustment and reference circuit involvement were developed and investigated to diminish those unwanted coupling influences. In the first approach, <i>V</i><sub>WB_in</sub> was increased, resulting in a higher current flowing through the WB piezoresistors as well as a temperature gradient reduction between the thermal actuator (heating resistor: HR) and the WB, which can consequently minimize the parasitic coupling. Nevertheless, increasing <i>V</i><sub>WB_in</sub> (e.g., from 1 to 3.3 V) may also yield an unwanted increase in power consumption by more than 10 times. Therefore, a second compensation method was considered: i.e., a reference electronic circuit is integrated with the cantilever sensor. Here, an electronic reference circuit was developed, which mimics the frequency behavior of the parasitic coupling. By subtracting the output of this circuit from the output of the cantilever, the resonance response can thus be improved. Both simulated and measured data show optimized amplitude and phase characteristics around resonant frequencies of 190.17 and 202.32 kHz, respectively. With this phase optimization in place, a phase-locked-loop (PLL) based system can be used to track the resonant frequency in real time, even under changing conditions of temperature (<i>T</i>) and relative humidity (RH), respectively. Finally, it is expected to enhance the sensitivity of such piezoresistive electro-thermal cantilever sensors under loading with any target analytes (e.g., particulate matter, gas, and humidity).</p>https://www.j-sens-sens-syst.net/8/37/2019/jsss-8-37-2019.pdf |
| spellingShingle | A. Setiono A. Setiono A. Setiono M. Fahrbach M. Fahrbach J. Xu J. Xu M. Bertke M. Bertke W. O. Nyang'au W. O. Nyang'au W. O. Nyang'au G. Hamdana G. Hamdana H. S. Wasisto H. S. Wasisto E. Peiner E. Peiner Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors Journal of Sensors and Sensor Systems |
| title | Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors |
| title_full | Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors |
| title_fullStr | Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors |
| title_full_unstemmed | Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors |
| title_short | Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors |
| title_sort | phase optimization of thermally actuated piezoresistive resonant mems cantilever sensors |
| url | https://www.j-sens-sens-syst.net/8/37/2019/jsss-8-37-2019.pdf |
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