Pressure profile calculation using finite element analysis that exploits the continuity of gas flow
We present a numerical method of calculating the pressure profile of a large ultra-high vacuum (UHV) system using finite-element analysis (FEA) that exploits the continuity of gas flow. In this study, we introduce a modified FEA (MFEA) that excludes the redundant count of aperture conductance of the...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2022-03-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/6.0001583 |