A Novel Design of High Resolution MEMS Gyroscope Using Mode-Localization in Weakly Coupled Resonators

A Novel Design of High Resolution MEMS Gyroscope Using Mode-Localization in Weakly Coupled Resonators

This paper presents a novel design for a high resolution microelectromechanical systems (MEMS) technology based resonant gyroscope using the mode-localization effect in weekly coupled resonators (WCRs) as a mechanism for sensing the input angular rate. The design consists of a single proof mass with...

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Bibliographic Details
Main Authors: Syed Ali Raza Bukhari, Muhammad Mubasher Saleem, Amir Hamza, Shafaat Ahmed Bazaz
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Access
Subjects:
Amplitude ratio
finite-element-method (FEM)
MEMS
microfabrication process
MEMS gyroscope
mode-localization
Online Access:https://ieeexplore.ieee.org/document/9585451/

Internet

https://ieeexplore.ieee.org/document/9585451/

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