Nano-electromechanical spatial light modulator enabled by asymmetric resonant dielectric metasurfaces
This work experimentally demonstrates nano-electromechanically tunable asymmetric dielectric metasurfaces. The metasurfaces enable large phase tuning, high reflection, a wavelength-scale pixel size, and electrical control of diffraction patterns.
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2022-10-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-022-33449-9 |