Electrophysical characteristics of germanium MIS structures with rare-earth element fluorides
The electrical properties of MIS structures with rare-earth element fluorides on germanium substrates were studied to analyze the possibility of using these materials as gate dielectrics of devices. The structures are also studied from the point of view of assessing the degradation of their electrop...
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| Format: | Article |
| Language: | English |
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Povolzhskiy State University of Telecommunications & Informatics
2021-09-01
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| Series: | Физика волновых процессов и радиотехнические системы |
| Subjects: | |
| Online Access: | https://journals.ssau.ru/pwp/article/viewFile/9359/8495 |