Electrophysical characteristics of germanium MIS structures with rare-earth element fluorides

Electrophysical characteristics of germanium MIS structures with rare-earth element fluorides

The electrical properties of MIS structures with rare-earth element fluorides on germanium substrates were studied to analyze the possibility of using these materials as gate dielectrics of devices. The structures are also studied from the point of view of assessing the degradation of their electrop...

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Bibliographic Details
Main Authors: Natalia V. Sachuk, Margarita B. Shalimova
Format: Article
Language:English
Published: Povolzhskiy State University of Telecommunications & Informatics 2021-09-01
Series:Физика волновых процессов и радиотехнические системы
Subjects:
mis structure
rare-earth element fluorides
gate dielectric
dielectric degradation
Online Access:https://journals.ssau.ru/pwp/article/viewFile/9359/8495

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