Parallel Grooved Microstructure Manufacturing on the Surface of Si<sub>3</sub>N<sub>4</sub> Ceramics by Femtosecond Laser

Parallel Grooved Microstructure Manufacturing on the Surface of Si<sub>3</sub>N<sub>4</sub> Ceramics by Femtosecond Laser

Machining special microstructures on the surface of silicon nitride ceramics helps improve their service performance. However, the high brittleness and low fracture toughness of silicon nitride ceramics make it extremely difficult to machine microstructures on their surface. In this study, a femtose...

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Bibliographic Details
Main Authors: Xufeng Wen, Yanfeng Gao, Hua Zhang, Yaxin Yang
Format: Article
Language:English
Published: MDPI AG 2024-03-01
Series:Micromachines
Subjects:
femtosecond laser
grooved microstructure
Si<sub>3</sub>N<sub>4</sub> ceramics
machining
Online Access:https://www.mdpi.com/2072-666X/15/3/394

Internet

https://www.mdpi.com/2072-666X/15/3/394

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