Magnetron sputtering deposition of Zn/AZO multilayer films: Towards the understanding of Zn diffusion in AZO film
The substrate/(200–900 nm) Al:ZnO (AZO)/15 nm Zn films were deposited on glass substrates at room temperature by magnetron sputtering, followed by a face-to-face annealing in vacuum. The effect of AZO thickness and the annealing treatment on the structure, morphology and electrical properties of the...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2019-06-01
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Series: | Results in Physics |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2211379719307491 |