Wet etching of platinum (Pt) electrodes for piezoelectric transducers using a thick photoresist mask

Wet etching of platinum (Pt) electrodes for piezoelectric transducers using a thick photoresist mask

Platinum (Pt) is widely used in MEMS applications due to its inert nature and high temperature stability. In general, Pt is patterned using dry etching methods which require expensive machinery. In this study, we propose wet etching of Pt electrodes of piezoelectric transducers in hot Aqua Regia at...

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Bibliographic Details
Main Authors: Aziz Koyuncuoğlu, Dilek Işık Akçakaya, Özlem Şardan Sukas, Haluk Külah
Format: Article
Language:English
Published: Elsevier 2022-08-01
Series:Micro and Nano Engineering
Subjects:
Platinum patterning
Aqua Regia
Pt-electrode
PLD-PZT
Wet etching
Thick photoresist
Online Access:http://www.sciencedirect.com/science/article/pii/S2590007222000508

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http://www.sciencedirect.com/science/article/pii/S2590007222000508

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