Generation of Neutral Chemically Reactive Species in Low-Pressure Plasma
The surface finish of organic and inorganic materials treated by gaseous plasma usually depends on the fluxes and fluencies of chemically reactive species such as molecular radicals. In low-pressure plasmas, the dissociation of molecules to parent atoms depends on the production rate in the gas phas...
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| Format: | Article |
| Language: | English |
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Frontiers Media S.A.
2022-05-01
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| Series: | Frontiers in Physics |
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| Online Access: | https://www.frontiersin.org/articles/10.3389/fphy.2022.895264/full |