Reliability of MEMS inertial devices in mechanical and thermal environments: A review

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

The reliability of MEMS inertial devices applied in complex environments involves interdisciplinary fields, such as structural mechanics, material mechanics and multi-physics field coupling. Nowadays, MEMS inertial devices are widely used in the fields of automotive industry, consumer electronics, a...

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Bibliographic Details
Main Authors: Yingyu Xu, Shuibin Liu, Chunhua He, Heng Wu, Lianglun Cheng, Guizhen Yan, Qinwen Huang
Format: Article
Language:English
Published: Elsevier 2024-03-01
Series:Heliyon
Subjects:
MEMS inertial devices
Thermal reliability
Mechanical reliability
Multiphysics coupling
Failure modes and mechanisms
Online Access:http://www.sciencedirect.com/science/article/pii/S2405844024035126

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http://www.sciencedirect.com/science/article/pii/S2405844024035126

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