Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography

Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography

Diffractive lenses can replicate the optical functions of their refractive counterparts using an equivalent surface relief phase profile, enabling more compact optical assemblies and microsystem integration. Greyscale lithography enables the direct definition of tridimensional photoresist lenses ato...

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Bibliographic Details
Main Authors: Diogo E. Aguiam, Joana D. Santos, Carlos Silva, Fabio Gentile, Carlos Ferreira, Inês S. Garcia, Joåo Cunha, João Gaspar
Format: Article
Language:English
Published: Elsevier 2022-04-01
Series:Micro and Nano Engineering
Subjects:
Greyscale lithography
Diffractive lenses
Optical characterization
LIDAR
Chromatic aberration
Imaging
Online Access:http://www.sciencedirect.com/science/article/pii/S2590007222000089

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http://www.sciencedirect.com/science/article/pii/S2590007222000089

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