Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography
Diffractive lenses can replicate the optical functions of their refractive counterparts using an equivalent surface relief phase profile, enabling more compact optical assemblies and microsystem integration. Greyscale lithography enables the direct definition of tridimensional photoresist lenses ato...
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2022-04-01
|
| Series: | Micro and Nano Engineering |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590007222000089 |
| _version_ | 1818339047355973632 |
|---|---|
| author | Diogo E. Aguiam Joana D. Santos Carlos Silva Fabio Gentile Carlos Ferreira Inês S. Garcia Joåo Cunha João Gaspar |
| author_facet | Diogo E. Aguiam Joana D. Santos Carlos Silva Fabio Gentile Carlos Ferreira Inês S. Garcia Joåo Cunha João Gaspar |
| author_sort | Diogo E. Aguiam |
| collection | DOAJ |
| description | Diffractive lenses can replicate the optical functions of their refractive counterparts using an equivalent surface relief phase profile, enabling more compact optical assemblies and microsystem integration. Greyscale lithography enables the direct definition of tridimensional photoresist lenses atop glass substrates, providing a simple nanofabrication process for complex micro-optics, compatible with nanoimprint replication. In this work, we report the greyscale fabrication and optical characterization of 10 × 10 mm2, NA ≈ 0.25, photoresist diffractive lenses for near-infrared LIDAR applications and evaluate their optical performance in the visible range for imaging. We demonstrate a two-lens varifocal system integrating diffractive lenses for λ = 1550 nm operation with a 55–215 mm focal length tuning range and an average spot size of ø188 ± 82 μm. In addition, we characterize the strong longitudinal chromatic aberration, typical of diffractive lenses, and evaluate their optical performance for imaging in the visible range. |
| first_indexed | 2024-12-13T15:20:47Z |
| format | Article |
| id | doaj.art-e42c86c392114991a1919632658ca1f7 |
| institution | Directory Open Access Journal |
| issn | 2590-0072 |
| language | English |
| last_indexed | 2024-12-13T15:20:47Z |
| publishDate | 2022-04-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Micro and Nano Engineering |
| spelling | doaj.art-e42c86c392114991a1919632658ca1f72022-12-21T23:40:35ZengElsevierMicro and Nano Engineering2590-00722022-04-0114100111Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithographyDiogo E. Aguiam0Joana D. Santos1Carlos Silva2Fabio Gentile3Carlos Ferreira4Inês S. Garcia5Joåo Cunha6João Gaspar7International Iberian Nanotechnology Laboratory (INL), 4715-330 Braga, Portugal; Corresponding author at: International Iberian Nanotechnology Laboratory (INL), 4715-330 Braga, PortugalInternational Iberian Nanotechnology Laboratory (INL), 4715-330 Braga, PortugalInternational Iberian Nanotechnology Laboratory (INL), 4715-330 Braga, Portugal; ALGORITMI Center, University of Minho, 4800-058 Guimarães, PortugalCentro de Tecnologia e Desenvolvimento Bosch, 4701-970 Braga, PortugalInternational Iberian Nanotechnology Laboratory (INL), 4715-330 Braga, Portugal; ALGORITMI Center, University of Minho, 4800-058 Guimarães, PortugalInternational Iberian Nanotechnology Laboratory (INL), 4715-330 Braga, Portugal; ALGORITMI Center, University of Minho, 4800-058 Guimarães, PortugalInternational Iberian Nanotechnology Laboratory (INL), 4715-330 Braga, PortugalInternational Iberian Nanotechnology Laboratory (INL), 4715-330 Braga, Portugal; Obducat Technologies AB, Scheelevägen 2, SE-223 63 Lund, SwedenDiffractive lenses can replicate the optical functions of their refractive counterparts using an equivalent surface relief phase profile, enabling more compact optical assemblies and microsystem integration. Greyscale lithography enables the direct definition of tridimensional photoresist lenses atop glass substrates, providing a simple nanofabrication process for complex micro-optics, compatible with nanoimprint replication. In this work, we report the greyscale fabrication and optical characterization of 10 × 10 mm2, NA ≈ 0.25, photoresist diffractive lenses for near-infrared LIDAR applications and evaluate their optical performance in the visible range for imaging. We demonstrate a two-lens varifocal system integrating diffractive lenses for λ = 1550 nm operation with a 55–215 mm focal length tuning range and an average spot size of ø188 ± 82 μm. In addition, we characterize the strong longitudinal chromatic aberration, typical of diffractive lenses, and evaluate their optical performance for imaging in the visible range.http://www.sciencedirect.com/science/article/pii/S2590007222000089Greyscale lithographyDiffractive lensesOptical characterizationLIDARChromatic aberrationImaging |
| spellingShingle | Diogo E. Aguiam Joana D. Santos Carlos Silva Fabio Gentile Carlos Ferreira Inês S. Garcia Joåo Cunha João Gaspar Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography Micro and Nano Engineering Greyscale lithography Diffractive lenses Optical characterization LIDAR Chromatic aberration Imaging |
| title | Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography |
| title_full | Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography |
| title_fullStr | Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography |
| title_full_unstemmed | Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography |
| title_short | Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography |
| title_sort | fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography |
| topic | Greyscale lithography Diffractive lenses Optical characterization LIDAR Chromatic aberration Imaging |
| url | http://www.sciencedirect.com/science/article/pii/S2590007222000089 |
| work_keys_str_mv | AT diogoeaguiam fabricationandopticalcharacterizationoflargeaperturediffractivelensesusinggreyscalelithography AT joanadsantos fabricationandopticalcharacterizationoflargeaperturediffractivelensesusinggreyscalelithography AT carlossilva fabricationandopticalcharacterizationoflargeaperturediffractivelensesusinggreyscalelithography AT fabiogentile fabricationandopticalcharacterizationoflargeaperturediffractivelensesusinggreyscalelithography AT carlosferreira fabricationandopticalcharacterizationoflargeaperturediffractivelensesusinggreyscalelithography AT inessgarcia fabricationandopticalcharacterizationoflargeaperturediffractivelensesusinggreyscalelithography AT joaocunha fabricationandopticalcharacterizationoflargeaperturediffractivelensesusinggreyscalelithography AT joaogaspar fabricationandopticalcharacterizationoflargeaperturediffractivelensesusinggreyscalelithography |