Multicomponent SF6 decomposition product sensing with a gas-sensing microchip
Abstract A difficult issue restricting the development of gas sensors is multicomponent recognition. Herein, a gas-sensing (GS) microchip loaded with three gas-sensitive materials was fabricated via a micromachining technique. Then, a portable gas detection system was built to collect the signals of...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2021-03-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-021-00246-1 |