SiCNFe Ceramics as Soft Magnetic Material for MEMS Magnetic Devices: A Mössbauer Study
Polymer-derived SiCNFe ceramics is a prospective material that can be used as soft magnets in MEMS magnetic applications. The optimal synthesis process and low-cost appropriate microfabrication should be developed for best result. Homogeneous and uniform magnetic material is required for developing...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-04-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/5/925 |