A Measurement System with High Precision and Large Range for Structured Surface Metrology Based on Atomic Force Microscope
With the rapid and continuous development of nanomanufacturing technology, the demands for both large range and high precision metrology of structured surfaces are becoming increasingly urgent. This paper proposes a metrological measurement system based on a commercial atomic force microscope. By us...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-03-01
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| Series: | Photonics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2304-6732/10/3/289 |