MEMSbased Double-Stacked Tower Biosensor Array with Integrated Readout Circuitry for Detection of Salivary pH as a Diagnostic Biomarker Applied for Chronic Periodontal Disease
MEMS based 3D double stacked tower pixel biosensor 10 × 10 array with integration of readout circuit for detection of saliva pH ion is demonstrated. The pixel biosensor comprised a driving electrode, sensing electrode and double stack tower pixel structure. The sensitivity of double stacked tower bi...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-11-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/22/22/8652 |