Thermodynamic Multi-Field Coupling Optimization of Microsystem Based on Artificial Intelligence

An efficient multi-objective optimization method of temperature and stress for a microsystem based on particle swarm optimization (PSO) was established, which is used to map the relationship between through-silicon via (TSV) structural design parameters and performance objectives in the microsystem,...

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Bibliographic Details
Main Authors: Guangbao Shan, Xudong Wu, Guoliang Li, Chaoyang Xing, Shengchang Zhang, Yu Fu
Format: Article
Language:English
Published: MDPI AG 2023-02-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/14/2/411