Control the deposition uniformity using ring cathode by DC discharge technique
Simulation of direct current (DC) discharge plasma using COMSOL Multiphysics software were used to study the uniformity of deposition on anode from DC discharge sputtering using ring and disc cathodes, then applied it experimentally to make comparison between film thickness distribution with simula...
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| Format: | Article |
| Language: | English |
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University of Baghdad
2019-01-01
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| Series: | Iraqi Journal of Physics |
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| Online Access: | https://ijp.uobaghdad.edu.iq/index.php/physics/article/view/156 |