Lightweight Thermal Compensation Technique for MEMS Capacitive Accelerometer Oriented to Quasi-Static Measurements
The application of MEMS capacitive accelerometers is limited by its thermal dependence, and each accelerometer must be individually calibrated to improve its performance. In this work, a light calibration method based on theoretical studies is proposed to obtain two characteristic parameters of the...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-04-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/21/9/3117 |