Fabrication of a Highly NO<sub>2</sub>-Sensitive Gas Sensor Based on a Defective ZnO Nanofilm and Using Electron Beam Lithography

Fabrication of a Highly NO<sub>2</sub>-Sensitive Gas Sensor Based on a Defective ZnO Nanofilm and Using Electron Beam Lithography

Hazardous substances produced by anthropic activities threaten human health and the green environment. Gas sensors, especially those based on metal oxides, are widely used to monitor toxic gases with low cost and efficient performance. In this study, electron beam lithography with two-step exposure...

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Bibliographic Details
Main Authors: Zhifu Feng, Damiano Giubertoni, Alessandro Cian, Matteo Valt, Matteo Ardit, Andrea Pedrielli, Lia Vanzetti, Barbara Fabbri, Vincenzo Guidi, Andrea Gaiardo
Format: Article
Language:English
Published: MDPI AG 2023-10-01
Series:Micromachines
Subjects:
gas sensor
ZnO
MEMS
electron beam lithography
low power consumption
nanofilm
Online Access:https://www.mdpi.com/2072-666X/14/10/1908

Internet

https://www.mdpi.com/2072-666X/14/10/1908

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