Fabrication of a Highly NO<sub>2</sub>-Sensitive Gas Sensor Based on a Defective ZnO Nanofilm and Using Electron Beam Lithography
Hazardous substances produced by anthropic activities threaten human health and the green environment. Gas sensors, especially those based on metal oxides, are widely used to monitor toxic gases with low cost and efficient performance. In this study, electron beam lithography with two-step exposure...
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MDPI AG
2023-10-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/14/10/1908 |
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| author | Zhifu Feng Damiano Giubertoni Alessandro Cian Matteo Valt Matteo Ardit Andrea Pedrielli Lia Vanzetti Barbara Fabbri Vincenzo Guidi Andrea Gaiardo |
| author_facet | Zhifu Feng Damiano Giubertoni Alessandro Cian Matteo Valt Matteo Ardit Andrea Pedrielli Lia Vanzetti Barbara Fabbri Vincenzo Guidi Andrea Gaiardo |
| author_sort | Zhifu Feng |
| collection | DOAJ |
| description | Hazardous substances produced by anthropic activities threaten human health and the green environment. Gas sensors, especially those based on metal oxides, are widely used to monitor toxic gases with low cost and efficient performance. In this study, electron beam lithography with two-step exposure was used to minimize the geometries of the gas sensor hotplate to a submicron size in order to reduce the power consumption, reaching 100 °C with 0.09 W. The sensing capabilities of the ZnO nanofilm against NO<sub>2</sub> were optimized by introducing an enrichment of oxygen vacancies through N<sub>2</sub> calcination at 650 °C. The presence of oxygen vacancies was proven using EDX and XPS. It was found that oxygen vacancies did not significantly change the crystallographic structure of ZnO, but they significantly improved the electrical conductivity and sensing behaviors of ZnO film toward 5 ppm of dry air. |
| first_indexed | 2024-03-10T21:03:04Z |
| format | Article |
| id | doaj.art-e53998f4bc2641b484c20c0634087793 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T21:03:04Z |
| publishDate | 2023-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-e53998f4bc2641b484c20c06340877932023-11-19T17:24:39ZengMDPI AGMicromachines2072-666X2023-10-011410190810.3390/mi14101908Fabrication of a Highly NO<sub>2</sub>-Sensitive Gas Sensor Based on a Defective ZnO Nanofilm and Using Electron Beam LithographyZhifu Feng0Damiano Giubertoni1Alessandro Cian2Matteo Valt3Matteo Ardit4Andrea Pedrielli5Lia Vanzetti6Barbara Fabbri7Vincenzo Guidi8Andrea Gaiardo9Istituto Italiano di Tecnologia, Via Morego, 30, 16163 Genova, ItalyMicro-Nano Characterization and Fabrication Facility Unit, Sensors and Devices Center, Bruno Kessler Foundation, Via Sommarive 18, 38123 Trento, ItalyMicro-Nano Characterization and Fabrication Facility Unit, Sensors and Devices Center, Bruno Kessler Foundation, Via Sommarive 18, 38123 Trento, ItalyMicro-Nano Characterization and Fabrication Facility Unit, Sensors and Devices Center, Bruno Kessler Foundation, Via Sommarive 18, 38123 Trento, ItalyDepartment of Physics and Earth Science, University of Ferrara, Via Saragat 1, 44122 Ferrara, ItalyMicro-Nano Characterization and Fabrication Facility Unit, Sensors and Devices Center, Bruno Kessler Foundation, Via Sommarive 18, 38123 Trento, ItalyMicro-Nano Characterization and Fabrication Facility Unit, Sensors and Devices Center, Bruno Kessler Foundation, Via Sommarive 18, 38123 Trento, ItalyDepartment of Physics and Earth Science, University of Ferrara, Via Saragat 1, 44122 Ferrara, ItalyDepartment of Physics and Earth Science, University of Ferrara, Via Saragat 1, 44122 Ferrara, ItalyMicro-Nano Characterization and Fabrication Facility Unit, Sensors and Devices Center, Bruno Kessler Foundation, Via Sommarive 18, 38123 Trento, ItalyHazardous substances produced by anthropic activities threaten human health and the green environment. Gas sensors, especially those based on metal oxides, are widely used to monitor toxic gases with low cost and efficient performance. In this study, electron beam lithography with two-step exposure was used to minimize the geometries of the gas sensor hotplate to a submicron size in order to reduce the power consumption, reaching 100 °C with 0.09 W. The sensing capabilities of the ZnO nanofilm against NO<sub>2</sub> were optimized by introducing an enrichment of oxygen vacancies through N<sub>2</sub> calcination at 650 °C. The presence of oxygen vacancies was proven using EDX and XPS. It was found that oxygen vacancies did not significantly change the crystallographic structure of ZnO, but they significantly improved the electrical conductivity and sensing behaviors of ZnO film toward 5 ppm of dry air.https://www.mdpi.com/2072-666X/14/10/1908gas sensorZnOMEMSelectron beam lithographylow power consumptionnanofilm |
| spellingShingle | Zhifu Feng Damiano Giubertoni Alessandro Cian Matteo Valt Matteo Ardit Andrea Pedrielli Lia Vanzetti Barbara Fabbri Vincenzo Guidi Andrea Gaiardo Fabrication of a Highly NO<sub>2</sub>-Sensitive Gas Sensor Based on a Defective ZnO Nanofilm and Using Electron Beam Lithography Micromachines gas sensor ZnO MEMS electron beam lithography low power consumption nanofilm |
| title | Fabrication of a Highly NO<sub>2</sub>-Sensitive Gas Sensor Based on a Defective ZnO Nanofilm and Using Electron Beam Lithography |
| title_full | Fabrication of a Highly NO<sub>2</sub>-Sensitive Gas Sensor Based on a Defective ZnO Nanofilm and Using Electron Beam Lithography |
| title_fullStr | Fabrication of a Highly NO<sub>2</sub>-Sensitive Gas Sensor Based on a Defective ZnO Nanofilm and Using Electron Beam Lithography |
| title_full_unstemmed | Fabrication of a Highly NO<sub>2</sub>-Sensitive Gas Sensor Based on a Defective ZnO Nanofilm and Using Electron Beam Lithography |
| title_short | Fabrication of a Highly NO<sub>2</sub>-Sensitive Gas Sensor Based on a Defective ZnO Nanofilm and Using Electron Beam Lithography |
| title_sort | fabrication of a highly no sub 2 sub sensitive gas sensor based on a defective zno nanofilm and using electron beam lithography |
| topic | gas sensor ZnO MEMS electron beam lithography low power consumption nanofilm |
| url | https://www.mdpi.com/2072-666X/14/10/1908 |
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