Analysis of a Capacitive Sensing Circuit and Sensitive Structure Based on a Low-Temperature-Drift Planar Transformer

In space gravitational-wave-detection missions, inertial sensors are used as the core loads, and their acceleration noise needs to reach <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mn>3</mn&g...

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Bibliographic Details
Main Authors: Yanlin Sui, Tao Yu, Longqi Wang, Zhi Wang, Ke Xue, Yuzhu Chen, Xin Liu, Yongkun Chen
Format: Article
Language:English
Published: MDPI AG 2022-11-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/22/23/9284